Investigation of Position and Velocity Stability of the Nanometer Resolution Linear Motor Stage with Air Bearings by Shaping of Controller Transfer Function

Investigation of Position and Velocity Stability of the Nanometer Resolution Linear Motor Stage with Air Bearings by Shaping of Controller Transfer Function

Modern industrial enterprises require high accuracy and precision feedback systems to fulfil cutting edge requirements of technological processes. As demand for a highly accurate system grows, a thin gap between throughput and quality exists. The conjunction of ultrafast lasers and modern control st...

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Bibliographic Details
Main Authors: Artur Piščalov, Edgaras Urbonas, Nikolaj Višniakov, Darius Zabulionis, Artūras Kilikevičius
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Symmetry
Subjects:
air bearings
linear motors
position control
velocity control
nanotechnologies
frequency response function
Online Access:https://www.mdpi.com/2073-8994/12/12/2062

Internet

https://www.mdpi.com/2073-8994/12/12/2062

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