Responsitivity Measurement of a Lorentz Force Transducer for Homogeneous and Inhomogeneous Magnetic Fields
This paper reports a MEMS gradiometer consisting of two independent, laterally oscillating masses on a single chip with integrated optical readout featuring a responsitivity of 35V/T at resonant operation. The symmetrical design of the two masses offers high accuracy and low cost by using convention...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-12-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/843 |