A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing

A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing

In this paper we demonstrate a novel acoustic wave pressure sensor, based on an aluminum nitride (AlN) piezoelectric thin film. It contains an integrated vacuum cavity, which is micro-fabricated using a cavity silicon-on-insulator (SOI) wafer. This sensor can directly measure the absolute pressure w...

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Bibliographic Details
Main Authors: Tao Wang, Zhengjie Tang, Huamao Lin, Kun Zhan, Jiang Wan, Shihao Wu, Yuandong Gu, Wenbo Luo, Wanli Zhang
Format: Article
Language:English
Published: MDPI AG 2020-03-01
Series:Sensors
Subjects:
piezoelectric
acoustic wave
pressure sensor
temperature compensation
vacuum cavity
Online Access:https://www.mdpi.com/1424-8220/20/6/1788

Internet

https://www.mdpi.com/1424-8220/20/6/1788

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