Dye-Containing Methacrylic Polymers in the Composition of Photo Resists for Complementary Metal Oxide Semiconductor Image Sensors
The trend in the development and manufacturing of Complementary Metal Oxide Semiconductor (CMOS) image sensors is to miniaturize pixels on the chips and hence to improve their imaging characteristics by providing a higher image resolution. As CMOS technology scales down into submicron regions, the c...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
al-Farabi Kazakh National University
2009-09-01
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| Series: | Eurasian Chemico-Technological Journal |
| Online Access: | http://ect-journal.kz/index.php/ectj/article/view/513 |