Q-Factor Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonator by Phononic Crystal-Reflector Composite Structure

Q-Factor Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonator by Phononic Crystal-Reflector Composite Structure

Thin-film piezoelectric-on-silicon (TPoS) microelectromechanical (MEMS) resonators are required to have high Q-factor to offer satisfactory results in their application areas, such as oscillator, filter, and sensors. This paper proposed a phononic crystal (PnC)-reflector composite structure to impro...

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Bibliographic Details
Main Authors: Jiacheng Liu, Temesgen Bailie Workie, Ting Wu, Zhaohui Wu, Keyuan Gong, Jingfu Bao, Ken-ya Hashimoto
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Micromachines
Subjects:
MEMS resonator
Q-factor
phononic crystals
acoustic reflector
Online Access:https://www.mdpi.com/2072-666X/11/12/1130

Internet

https://www.mdpi.com/2072-666X/11/12/1130

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