Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

To monitor airborne nano-sized particles (NPs), a single-chip differential mobility particle sizer (DMPS) based on resonant micro cantilevers in defined micro-fluidic channels (µFCs) is introduced. A size bin of the positive-charged fraction of particles herein is separated from the air stream by al...

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Bibliographic Details
Main Authors: Maik Bertke, Ina Kirsch, Erik Uhde, Erwin Peiner
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Sensors
Subjects:
differential mobility particle sizer
micro electro mechanical system
micro-fluidic channel
piezoresistive micro cantilever
picogram balance
ultrafine particles
Online Access:https://www.mdpi.com/1424-8220/21/11/3731

Internet

https://www.mdpi.com/1424-8220/21/11/3731

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