In-Situ Evaluation of the Pitch of a Reflective-Type Scale Grating by Using a Mode-Locked Femtosecond Laser

In-Situ Evaluation of the Pitch of a Reflective-Type Scale Grating by Using a Mode-Locked Femtosecond Laser

Major modifications are made to the setup and signal processing of the method of in-situ measurement of the pitch of a diffraction grating based on the angles of diffraction of the diffracted optical frequency comb laser emanated from the grating. In the method, the improvement of the uncertainty of...

Full description

Bibliographic Details
Main Authors: Dong Wook Shin, Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Yindi Cai, Eberhard Manske, Wei Gao
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Applied Sciences
Subjects:
diffraction grating
grating pitch
mode-locked femtosecond laser
laser diffraction
diffraction equation
measurement uncertainty analysis
Online Access:https://www.mdpi.com/2076-3417/11/17/8028

Internet

https://www.mdpi.com/2076-3417/11/17/8028

Similar Items