Study of Ni Metallization in Macroporous Si Using Wet Chemistry for Radio Frequency Cross-Talk Isolation in Mixed Signal Integrated Circuits

Study of Ni Metallization in Macroporous Si Using Wet Chemistry for Radio Frequency Cross-Talk Isolation in Mixed Signal Integrated Circuits

A highly conductive moat or Faraday cage of through-the-wafer thickness in Si substrate was proposed to be effective in shielding electromagnetic interference thereby reducing radio frequency (RF) cross-talk in high performance mixed signal integrated circuits. Such a structure was realized by metal...

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Bibliographic Details
Main Authors: King-Ning Tu, Ya-Hong Xie, Kyuchul Chong, Chengkun Xu, Xi Zhang
Format: Article
Language:English
Published: MDPI AG 2011-05-01
Series:Materials
Subjects:
RF cross-talk isolation
macroporous Si
Ni metallization
Online Access:http://www.mdpi.com/1996-1944/4/6/952/

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http://www.mdpi.com/1996-1944/4/6/952/

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