Rigorous coupled-wave analysis of absorption enhancement in vertically illuminated silicon photodiodes with photon-trapping hole arrays

Rigorous coupled-wave analysis of absorption enhancement in vertically illuminated silicon photodiodes with photon-trapping hole arrays

In this paper, we present a rigorous coupled-wave analysis (RCWA) of absorption enhancement in all-silicon (Si) photodiodes with integrated hole arrays of different shapes and dimensions. The RCWA method is used to analyze the light propagation and trapping in the photodiodes on both Si-on-insulator...

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Bibliographic Details
Main Authors: Gou Jun, Cansizoglu Hilal, Bartolo-Perez Cesar, Ghandiparsi Soroush, Mayet Ahmed S., Rabiee-Golgir Hossein, Gao Yang, Wang Jun, Yamada Toshishige, Devine Ekaterina Ponizovskaya, Elrefaie Aly F., Wang Shih-Yuan, Islam M. Saif
Format: Article
Language:English
Published: De Gruyter 2019-09-01
Series:Nanophotonics
Subjects:
all-silicon photodiode
nanoholes
phototrapping
rigorous coupled-wave analysis
Online Access:http://www.degruyter.com/view/j/nanoph.2019.8.issue-10/nanoph-2019-0164/nanoph-2019-0164.xml?format=INT

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http://www.degruyter.com/view/j/nanoph.2019.8.issue-10/nanoph-2019-0164/nanoph-2019-0164.xml?format=INT

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