Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries
A piezo resistive, phase locked loop (PLL) controlled micro tactile measurement system for contact resonance spectroscopy (CRS) at high-aspect-ratio geometries was developed and characterised. Therefore, a piezo resistive silicon cantilever with a silicon tip at its free end was brought into contact...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2017-08-01
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Series: | Proceedings |
Subjects: | |
Online Access: | https://www.mdpi.com/2504-3900/1/4/371 |