Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries

Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries

A piezo resistive, phase locked loop (PLL) controlled micro tactile measurement system for contact resonance spectroscopy (CRS) at high-aspect-ratio geometries was developed and characterised. Therefore, a piezo resistive silicon cantilever with a silicon tip at its free end was brought into contact...

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Bibliographic Details
Main Authors: Maik Bertke, Uili Wobeto Reinheimer, Michael Fahrbach, Gerry Hamdana, Hutomo Suryo Wasisto, Erwin Peiner
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
contact resonance spectroscopy
high-aspect-ratio layer analysis
material analysis
piezoresistive
tactile cantilever
Online Access:https://www.mdpi.com/2504-3900/1/4/371
Description
Summary:A piezo resistive, phase locked loop (PLL) controlled micro tactile measurement system for contact resonance spectroscopy (CRS) at high-aspect-ratio geometries was developed and characterised. Therefore, a piezo resistive silicon cantilever with a silicon tip at its free end was brought into contact with a sample surface and excited into resonance by a piezo actuator. The resonance frequency of the contacted cantilever was tracked by a homemade closed-loop PLL circuit. Different materials and layer thicknesses of photo resist (PR) on silicon were used to validate the system. To optimise the sensitivity and efficiency of the measurement system, amplitude and phase of the cantilever in surface contact were analysed under different contact forces and excitation amplitudes.
ISSN:2504-3900

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