Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries

Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries

A piezo resistive, phase locked loop (PLL) controlled micro tactile measurement system for contact resonance spectroscopy (CRS) at high-aspect-ratio geometries was developed and characterised. Therefore, a piezo resistive silicon cantilever with a silicon tip at its free end was brought into contact...

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Bibliographic Details
Main Authors: Maik Bertke, Uili Wobeto Reinheimer, Michael Fahrbach, Gerry Hamdana, Hutomo Suryo Wasisto, Erwin Peiner
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
contact resonance spectroscopy
high-aspect-ratio layer analysis
material analysis
piezoresistive
tactile cantilever
Online Access:https://www.mdpi.com/2504-3900/1/4/371

Internet

https://www.mdpi.com/2504-3900/1/4/371

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