Investigation of X and Y Configuration Modal and Dynamic Response to Velocity Excitation of the Nanometer Resolution Linear Servo Motor Stage with Quasi-Industrial Guiding System in Quasi-Stable State

Investigation of X and Y Configuration Modal and Dynamic Response to Velocity Excitation of the Nanometer Resolution Linear Servo Motor Stage with Quasi-Industrial Guiding System in Quasi-Stable State

Research institutions and industrial enterprises demand high accuracy and precision positioning systems to fulfil cutting edge requirements of up-to-date technological processes in the field of metrology and optical fabrication. Linear motor system design with high performance mechanical guiding sys...

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Bibliographic Details
Main Authors: Artur Piščalov, Edgaras Urbonas, Darius Vainorius, Jonas Matijošius, Artūras Kilikevičius
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Mathematics
Subjects:
mechanical bearings
linear motors
position control
velocity control
nanotechnologies
frequency response function
Online Access:https://www.mdpi.com/2227-7390/9/9/951

Internet

https://www.mdpi.com/2227-7390/9/9/951

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