A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope

A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope

This paper reports a novel design for the decoupling of microelectromechanical systems (MEMS) gyroscopes. The MEMS gyroscope is based on piezoelectric aluminum nitride (AlN) film, and the main structure is a mass hung by T-shape beams. A pair of parallel drive electrodes are symmetrically placed on...

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Bibliographic Details
Main Authors: Jian Yang, Chaowei Si, Guowei Han, Meng Zhang, Jin Ning, Yongmei Zhao, Fuhua Yang, Xiaodong Wang
Format: Article
Language:English
Published: MDPI AG 2019-04-01
Series:Micromachines
Subjects:
aluminum nitride
microelectromechanical systems (MEMS)
gyroscope
piezoelectric effect
orthogonal coupling
Online Access:https://www.mdpi.com/2072-666X/10/4/244

Internet

https://www.mdpi.com/2072-666X/10/4/244

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