3D-Printed MEMS Magnetometer Featuring Compliant Mechanism

3D-Printed MEMS Magnetometer Featuring Compliant Mechanism

This paper reports a novel 3D-printed MEMS resonant magnetometer with optical readout which features a mechanical conversion of a vertical oscillation into a horizontal one. This demonstrates the advantages of 3D-printing technology in terms of rapid prototyping, low costs and fast product developme...

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Bibliographic Details
Main Authors: Matthias Kahr, Harald Steiner, Wilfried Hortschitz, Michael Stifter, Andreas Kainz, Franz Keplinger
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Proceedings
Subjects:
3D-printing
magnetometer
optical readout
lorentz force
complient mechanism
Online Access:https://www.mdpi.com/2504-3900/2/13/784

Internet

https://www.mdpi.com/2504-3900/2/13/784

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