A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer

A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer

In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including the mass and the springs, is excited to resonate i...

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Bibliographic Details
Main Authors: Jian Yang, Meng Zhang, Yurong He, Yan Su, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang, Xiaodong Wang
Format: Article
Language:English
Published: MDPI AG 2019-09-01
Series:Micromachines
Subjects:
MEMS
AlN thin film
piezoelectric effect
resonant accelerometer
z-axis
Online Access:https://www.mdpi.com/2072-666X/10/9/589

Internet

https://www.mdpi.com/2072-666X/10/9/589

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