Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor

Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor

In this paper, small-sized acoustic horns, the sensitivity enhancement package for the MEMS-based thermal acoustic particle velocity sensor, have been designed and optimized. Four kinds of acoustic horns, including tube horn, double cone horn, double paradox horn, and exponential horn, were analyzed...

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Bibliographic Details
Main Authors: Wenhan Chang, Lingmeng Yang, Zhezheng Zhu, Zhenchuan Yang, Yilong Hao, Chengchen Gao
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Sensors
Subjects:
small-sized
acoustic horn
thermal acoustic particle velocity sensor
sensitivity enhancement
Online Access:https://www.mdpi.com/1424-8220/21/13/4337

Internet

https://www.mdpi.com/1424-8220/21/13/4337

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