5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range

5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range

We report on recent progress in developing diffraction gratings which can potentially provide extremely high spectral resolution of 10[superscript 5]-10[superscript 6] in the EUV and soft x-ray photon energy ranges. Such a grating was fabricated by deposition of a multilayer on a substrate which con...

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Bibliographic Details
Main Authors: Schattenburg, Mark Lee (Contributor), Chang, Chih-Hao (Contributor), Ahn, Minseung (Contributor), Padmore, Howard A. (Author), Yashchuk, Valeriy V. (Author), Gullikson, Eric M. (Author), Salmassi, Farhad (Author), Cambie, Rossana (Author), Anderson, Erik H. (Author), Voronov, Dmitriy L. (Author), Heilmann, Ralf K (Author)
Other Authors: MIT Kavli Institute for Astrophysics and Space Research (Contributor), Heilmann, Ralf K. (Contributor)
Format: Article
Language:English
Published: The International Society for Optical Engineering, 2010-03-18T15:01:08Z.
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