Silver nanoparticle structures realized by digital surface micromachining

We report a new surface micromachining process using commercial silver nanoparticle inks and digital fabrication methods. This process is entirely digital (non-lithographic patterning), the feature sizes can be <20 mum, and the maximum temperature is less than 250degC. Furthermore, we have comple...

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Bibliographic Details
Main Authors: Schmidt, Martin Arnold (Contributor), Lam, Eric Wing-Jing (Contributor), Li, Hanqing (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Microsystems Technology Laboratories (Contributor)
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineers, 2010-10-26T18:14:27Z.
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