Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process

Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process

CS MANTECH Conference, May 18th-21st, 2009, Tampa, Florida, USA

Bibliographic Details
Main Authors: Demirtas, Sefa (Contributor), del Alamo, Jesus A. (Contributor), Gajewski, Donald A. (Author), Hanson, Allen (Author)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor)
Format: Article
Language:English
Published: CS ManTech, 2012-07-11T15:41:46Z.
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