Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist
A scanning-helium-ion-beam microscope is now commercially available. This microscope can be used to perform lithography similar to, but of potentially higher resolution than, scanning electron-beam lithography. This article describes the control of this microscope for lithography via beam steering/b...
Main Authors: | , , , , , , , , , , |
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Other Authors: | , |
Format: | Article |
Language: | English |
Published: |
American Vacuum Society (AVS),
2012-10-18T19:19:48Z.
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Subjects: | |
Online Access: | Get fulltext |