Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer

Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer

The authors investigated a contrast enhancement behavior of hydrogen silsesquioxane (HSQ) in a salty development system (NaOH/NaCl). Time-resolved analysis of contrast curves and line-grating patterns were carried out to investigate the unique properties of a salty development process. In NaOH devel...

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Bibliographic Details
Main Authors: Nam, Sung-Wook (Author), Rooks, Michael J. (Author), Yang, Joel K. W. (Contributor), Berggren, Karl K. (Contributor), Kim, Hyun-Mi (Author), Lee, Min-Hyun (Author), Kim, Ki-Bum (Author), Sim, Jae Hwan (Author), Yoon, Do Yeung (Author)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor)
Format: Article
Language:English
Published: American Vacuum Society (AVS), 2012-10-19T14:13:58Z.
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