I. STUDY ON POLYSILICON-PLASMA II.QUANTIFICATION ISSUES OF VAPOR PHASE DECOMPOSITION/TOTAL REFLECTION X-RAY FLUORESCENCE ANALYSIS
博士 === 國立交通大學 === 電子工程系 === 87 === This dissertation studies the polysilicon thin film-its plasma effects and a high breakdown voltage of Schottky diode made with polysilicon as the guard ring, and the quantification issues of vapor phase decomposition/total X-ray reflection fluorescence (VPD/TXRF)...
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| Format: | Others |
| Language: | zh-TW |
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1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29683153682467942590 |