On the buckling behavior of micromachined beams
碩士 === 國立清華大學 === 動力機械工程學系 === 87 === Thin film materials are normally under residual stresses as a result of fabrication processes. Unlike microelectronics devices, a micro-mechanical structure is no longer constrained by its underlying silicon substrate after anisotropic etch undercutt...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61109838822443426976 |