Integration of UV Curable Polymer Lens with MUMPs Structure on SOI Wafer
碩士 === 國立清華大學 === 動力機械工程學系 === 92 === Micro lenses can play important roles in many micro optical systems, which applications are ranging from optical communication, optical storage, display, to biotechnology. In micro lenses fabrication, there are many advantages for UV curable polymer lens, such a...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/85495560897595194422 |