| Summary: | 碩士 === 國立清華大學 === 動力機械工程學系 === 92 === Micro lenses can play important roles in many micro optical systems, which applications are ranging from optical communication, optical storage, display, to biotechnology. In micro lenses fabrication, there are many advantages for UV curable polymer lens, such as high transmission, low surface roughness, and the most important thing is easy to fabricate (i.e. drip and solidification) and to integrate with other structures. However, the integration of UV curable polymer lens with complicated structures to provide various components hasn’t been reported. Accordingly, this work presents a silicon optical bench (SiOB) consisted of UV curable polymer lens, thin film MUMPs components, and thick SOI structures. For the reason that the MUMPs process is regarded as the most popular fabrication for MEMS devices and the thin film poly-Si surface micromachining also provides variety. Moreover, there are good properties for bulk silicon as actuator and fiber housing. So, the integration of UV curable polymer lens with MUMPs structure on SOI wafer is a good choice for optical application. In this work, we will demonstrate a bulk silicon optical bench with bulk silicon actuator, bulk silicon fiber clamp, and drip UV curable polymer on thin film poly-Si structure. The characterization of lens including transmission, roughness, and other optical properties will also be measured.
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