Design and Fabrication of An Electro-Thermal Microactuator with Multi-Lateral Motion in Plane
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 92 === In this paper, we present a new electro-thermal microactuator to have multi-lateral motion in-plane by only varying voltage potentials at two contact pads. The new microactuator combine the traits of two basic electro-thermal microactators proposed by Guckel (...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86931418016452574313 |