Design and Fabrication of An Electro-Thermal Microactuator with Multi-Lateral Motion in Plane

碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 92 === In this paper, we present a new electro-thermal microactuator to have multi-lateral motion in-plane by only varying voltage potentials at two contact pads. The new microactuator combine the traits of two basic electro-thermal microactators proposed by Guckel (...

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Bibliographic Details
Main Authors: Yi-Kun Chen, 陳義坤
Other Authors: Chia-Lung Chang
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/86931418016452574313

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