A neural-network approach for wafer defects pattern classification
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 93 === Nowadays, the procedures of semiconductor manufacturing have become more and more sophisticated. Though highly automated facilities are used to process the complex manufacturing steps in the near particle free environment, the yield loss is still unavoidable....
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2005
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Online Access: | http://ndltd.ncl.edu.tw/handle/44586708557044604231 |