The Development of Optical MEMS Fabrication Platform — the Case of Micro Scanning Mirror Driven by Electrostatic Comb-drive Actuator
博士 === 國立清華大學 === 動力機械工程學系 === 93 === Optical Microelectromechanical systems (MEMS) have recently emerged as a powerful means of implementing such functions in compact and low-cost form, owing to the unique capability of this technology to integrate optical, mechanical, and electrical components on...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/12440256984580055533 |