Application on nano/micro electromechanical systems using plasma treatment technology
博士 === 國立清華大學 === 微機電工程研究所 === 95 === The traditional nano/micro systems devices were fabricated using standard semiconductor processes as well as micro fabrication processes. Thus the design and applications of the nano/micro devices are frequently limited to these processes. In this study, the int...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51533916128880325200 |