A NOVEL OUT-OF-PLANE ACCELEROMETER WITH FULLY-DIFFERENTIAL SENSING CIRCUIT AND SUB-MICRON GAP
碩士 === 國立清華大學 === 微機電工程研究所 === 95 === This thesis presents a novel CMOS-MEMS out-of-plane linear accelerometer. This capacitance type accelerometer contains special designed gap-closing sensing electrode arrays with on-chip fully differential sensing circuits. Moreover, the comb-finger electrodes ha...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46234646091030299591 |