Design and Fabrication of Novel CMOS MEMS Micro-Optical Positioning and Focusing Stages
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 96 === This thesis presents a novel CMOS MEMS micro-optical stage. The stage contains a Fresnel lens in the center, and then combines in-plane and out-of-plane thermal actuators outside. Thus, the focal length can be tuned by out-of-plane thermal actuator, and focal...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47608941805016374551 |