Performance Enhancement of Integrated Micromechanical Resonators Using Generalized CMOS-MEMS Platforms
博士 === 國立清華大學 === 動力機械工程學系 === 101 === The CMOS-MEMS technology with many advantages, including smaller footprints size, without noise from bond pad, and standard foundry process, is utilized in this dissertation to develop various capacitively-transduced HF/VHF micromechanical resonators with sever...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47063715191943538163 |