Design, Implementation and Integration of CMOS-MEMS Motion Sensors
博士 === 國立清華大學 === 奈米工程與微系統研究所 === 102 === In this study, a sensor integration chip is designed and implemented based on the standard TSMC 0.35 μm 2-polysilicon 4-Metal (2P4M) process. This study implements and further monolithic integrates the tri-axis accelerometer, tri-axis magnetic sensor, pressu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/cbn8z3 |