Optimization of etching processes for the fabrication of smooth silicon carbide membranes for applications in quantum technology
Recently, it has been demonstrated that Silicon Carbide (SiC) membranes can be used in quantum sensing and MEMS applications. One of the important steps for the production of such membranes is the removal of the substrate material in order to form membranes of micron or submicron thicknesses confini...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier B.V.
2022
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |